OLED / SOLAR CELL / PEROVSKITE CELL

• Applicable for metal, semi-conductor, and organic film, OLED, PLED,
Solar, Perovskite Cell and other applications.

• Integrated with Evaporator and Spin Coater.

• With Ultra-clean Purification System on the top.
- Cleanliness level reached to 10.
- High efficiency filter H13 grade to ultra-high efficiency filter U15 grade.
- Filtration particle size: 0.12μm.